Pull-in behaviour of a micro switch actuated by the electrostatic under a uniform longitudinal magnetic field based on nonlocal couple stress theory

Document Type : Research Paper

Authors

1 Department of Mechanical Engineering, Sousangerd Branch, Islamic Azad University, Sousangerd, Iran

2 Department of Mechanical Engineering, Yasouj University, Yasouj, Iran

3 Department of Mechanical Engineering, University of Jiroft, Jiroft, Iran

Abstract

Today the micro electromechanical systems industry is widely developed. This article aims to study static pull-in instability of a clamped micro-switch which is exerted by an electric potential difference in presence of a longitudinal magnetic field. The size dependent nonlocal couple stress theory in framework of Bernoulli-Euler beam hypothesis is utilized to model a clamped micro-switch. The equilibrium equation of micro-beam in micro-switch is derived using the principle of virtual work. To obtain the dimensionless pull-in voltage of micro-switch, the equilibrium equation is solved by Galerkin method. The effect of longitudinal magnetic field and some geometric parameter of micro-beam on the pull-in voltage is studied, taking into account the effects of a set of size dependent factors with and without considering the fringing field. The results from developed model are validated by comparing them with benchmark results.

Keywords

Main Subjects

[1]          A. Barati, M. M. Adeli, A. Hadi, Static torsion of bi-directional functionally graded microtube based on the couple stress theory under magnetic field, International Journal of Applied Mechanics, Vol. 12, No. 02, pp. 2050021, 2020.
[2]          M. Najafzadeh, M. M. Adeli, E. Zarezadeh, A. Hadi, Torsional vibration of the porous nanotube with an arbitrary cross-section based on couple stress theory under magnetic field, Mechanics Based Design of Structures and Machines, Vol. 50, No. 2, pp. 726-740, 2022.
[3]          A. Hadi, A. Rastgoo, N. Haghighipour, A. Bolhassani, Numerical modelling of a spheroid living cell membrane under hydrostatic pressure, Journal of Statistical Mechanics: Theory and Experiment, Vol. 2018, No. 8, pp. 083501, 2018.
[4]          M. Emadi, M. Z. Nejad, S. Ziaee, A. Hadi, Buckling analysis of arbitrary two-directional functionally graded nano-plate based on nonlocal elasticity theory using generalized differential quadrature method, Steel and Composite Structures, An International Journal, Vol. 39, No. 5, pp. 565-581, 2021.
[5]          R. Noroozi, A. Barati, A. Kazemi, S. Norouzi, A. Hadi, Torsional vibration analysis of bi-directional FG nano-cone with arbitrary cross-section based on nonlocal strain gradient elasticity, Advances in nano research, Vol. 8, No. 1, pp. 13-24, 2020.
[6]          M. K. Mishra, V. Dubey, P. Mishra, I. Khan, MEMS technology: A review, J. Eng. Res. Rep, Vol. 4, No. 1, pp. 1-24, 2019.
[7]          Y. J. Chen, Advantages of mems and its distinct new applications, in Proceeding of, Trans Tech Publ, pp. 205-209.
[8]          S. S. Sadeghi, A. Hadi, M. M. Mashhadi, Viscosity of Fe2O3-water nanofluids by molecular dynamics simulations: Effects of nanoparticle content, temperature and size, Journal of Molecular Liquids, Vol. 382, pp. 121859, 2023.
[9]          B. McCarthy, G. G. Adams, N. E. McGruer, D. Potter, A dynamic model, including contact bounce, of an electrostatically actuated microswitch, Journal of microelectromechanical systems, Vol. 11, No. 3, pp. 276-283, 2002.
[10]        H. Raeisifard, M. N. Bahrami, A. Yousefi-Koma, H. R. Fard, Static characterization and pull-in voltage of a micro-switch under both electrostatic and piezoelectric excitations, European Journal of Mechanics-A/Solids, Vol. 44, pp. 116-124, 2014.
[11]        X. L. Jia, J. Yang, S. Kitipornchai, Pull-in instability of geometrically nonlinear micro-switches under electrostatic and Casimir forces, Acta mechanica, Vol. 218, No. 1, pp. 161-174, 2011.
[12]        F. Tavakolian, A. Farrokhabadi, M. Mirzaei, Pull-in instability of double clamped microbeams under dispersion forces in the presence of thermal and residual stress effects using nonlocal elasticity theory, Microsystem Technologies, Vol. 23, No. 4, pp. 839-848, 2017/04/01, 2017.
[13]        S. Chowdhury, M. Ahmadi, W. C. Miller, Pull-in voltage calculations for MEMS sensors with cantilevered beams, in Proceeding of, 143-146.
[14]        A. Sharma, P. J. George, A simple method for calculation of the pull-in voltage and touch-point pressure for the small deflection of square diaphragm in MEMS, Sensors and Actuators A: Physical, Vol. 141, No. 2, pp. 376-382, 2008/02/15/, 2008.
[15]        H. Mobki, G. Rezazadeh, M. Sadeghi, F. Vakili-Tahami, M.-M. Seyyed-Fakhrabadi, A comprehensive study of stability in an electro-statically actuated micro-beam, International Journal of Non-Linear Mechanics, Vol. 48, pp. 78-85, 2013.
[16]        M. M. S. Fakhrabadi, A. Rastgoo, M. T. Ahmadian, M. M. Mashhadi, Dynamic analysis of carbon nanotubes under electrostatic actuation using modified couple stress theory, Acta Mechanica, Vol. 225, No. 6, pp. 1523-1535, 2014.
[17]        J. Torabi, R. Ansari, A. Zabihi, K. Hosseini, Dynamic and pull-in instability analyses of functionally graded nanoplates via nonlocal strain gradient theory, Mechanics Based Design of Structures and Machines, pp. 1-21, 2020.
[18]        S. Hosseini, R. Ansari, J. Torabi, K. Hosseini, A. Zabihi, Nonlocal strain gradient pull-in study of nanobeams considering various boundary conditions, Iranian Journal of Science and Technology, Transactions of Mechanical Engineering, Vol. 45, No. 4, pp. 891-909, 2021.
[19]        M. Rahaeifard, M. Kahrobaiyan, M. Asghari, M. Ahmadian, Static pull-in analysis of microcantilevers based on the modified couple stress theory, Sensors and Actuators A: Physical, Vol. 171, No. 2, pp. 370-374, 2011.
[20]        M. Z. Nejad, A. Hadi, Non-local analysis of free vibration of bi-directional functionally graded Euler–Bernoulli nano-beams, International Journal of Engineering Science, Vol. 105, pp. 1-11, 2016/08/01/, 2016.
[21]        M. A. Attia, F. F. Mahmoud, Modeling and analysis of nanobeams based on nonlocal-couple stress elasticity and surface energy theories, International Journal of Mechanical Sciences, Vol. 105, pp. 126-134, 2016/01/01/, 2016.
[22]        A. Ghanbari, A. Babaei, The new boundary condition effect on the free vibration analysis of micro-beams based on the modified couple stress theory, International Research Journal of Applied and Basic Sciences, Vol. 9, No. 3, pp. 274-279, 2015.
[23]        A. C. Eringen, Nonlocal polar elastic continua, International journal of engineering science, Vol. 10, No. 1, pp. 1-16, 1972.
Volume 54, Issue 4
December 2023
Pages 577-587
  • Receive Date: 24 June 2023
  • Revise Date: 30 August 2023
  • Accept Date: 30 August 2023