Modeling and Analysis of a High-Frequency RF MEMS Double-Clamped Beam Resonator for HF Mechanical Filters

Kurmendra, Kurmendra

doi:10.22059/jcamech.2026.420335.1921

Modeling and Analysis of a High-Frequency RF MEMS Double-Clamped Beam Resonator for HF Mechanical Filters

Document Type : Research Paper

Author

Kurmendra Kurmendra

Department of Electronics and Communication Engineering, North Eastern Regional Institute of Science and Technology, Nirjuli-791109, Arunachal Pradesh, India

10.22059/jcamech.2026.420335.1921

Abstract

This paper presents a High Frequency RF MEMS double-clamped beam resonator model. It focuses on yielding a resonant frequency in the HF range. Since the resonant frequency of a micromechanical resonator highly depends on its geometry, hence it is considered to be the most important consideration while designing a micromechanical resonator. Therefore, this work presents a close study of geometric dependencies of resonant frequency of a micro-electro- mechanical resonator. A double-clamped beam structure has been used as base resonator which is suspended above the substrate and the conductive strip underlying just below the center of the resonator served as capacitive transducer electrode to induce resonator vibration in the direction perpendicular to the substrate. A DC actuation voltage of 35V with 100 mV drive is applied to the moving part of the beam to create the necessary electrostatic for its movement and an AC signal is applied for the oscillation of the beam. The beam will show its oscillation with maximum amplitude at its resonance frequency. The resonance frequency of 7.7 MHz with quality factor of 1000 was yielded through the proposed resonator and this has potential suitability for high frequency mechanical filters.

Keywords

MEMS

High Frequency

Accelerometer

Actuation Voltage

Beam Structure

Mechanical Filter

Subjects

MEMS,NEMS

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